New silicon micromechanical resonant viscosity vacuum gage

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology

Volumn 17, Issue 3, 1997, Pages 153-159

  Wang, Yaqiang ^a   Jin, Zhonghe ^a   Wang, Yuelin ^a   Ding, Chun ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; RESONANCE; SILICON; VISCOSITY;

ELECTROSTATIC EXCITATION; VACUUM SENSOR;

VACUUM GAGES;

EID: 0031141796     PISSN: 02539748     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)