Obtaining a physical two-dimensional Cartesian reference

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2173-2176

  Takac, Michael T ^a   Ye, Jun ^b   Raugh, Michael R ^c   Pease, R Fabian ^d   Berglund, C Neil ^e   Owen, Geraint ^f  

^a IBM   (United States)

^b KLA TENCOR CORPORATION   (United States)

^c Interconnect Technologies Corporation   (United States)

^d Stanford University   (United States)

^e OREGON HEALTH AND SCIENCE UNIVERSITY   (United States)

^f HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040216418     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589347     Document Type: Article

References (7)

1. E. A. Lord and C. B. Wilson, The Mathematical Description of Shape and Form (Ellis Horwood, Chichester, 1984), pp. 14-15.
2. M. R. Raugh, Computer Systems Laboratory, Stanford University Technical Report: CS1-TR-91-484, July 1991.
3. M. T. Takac, BACUS Photomask News, SPIE, March 1994.
4. M. R. Raugh, Precision Engineering (Butterworth London, 1985).
5. M. T. Takac, J. Ye, M. R. Raugh, R. F. Pease, C. N. Berglund, and G. Owen, Proc. SPIE 2725, 130 (1996).
6. J. Ye, Ph.D. theses, Stanford University, 1996.
7. J. Ye, M. T. Takac, C. N. Berglund, G. Owen, and R. F. Pease, Precision Eng. 20, 16 (1997).