Exploiting structure of wafer distortion in global alignment

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3642-3646

  Ghazanfarian, Amir A ^a   Chen, Xun ^a   McCord, Mark A ^a   Fabian, R ^a   Pease, W ^a   Nguyen, Khanh ^b   Levinson, Harry ^b  

^a STANFORD UNIVERSITY   (United States)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039032355     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590319     Document Type: Article

References (5)

1. J. Ye et al., J. Vac. Sci. Technol. B 13, 2904 (1995).
2. A. A. Ghazanfarian et al, Proc. SPIE (to be published).
3. A. A. Ghazanfarian et al. Proc. IEEE 4, 1913 (1998).
4. J. Rissanen, Ann. Statistics 11, 417 (1983).
5. T. Kailath, Linear Least-Squares Estimation (Halsted, 1977).