New three dimensional simulator for low energy (∼1 keV) electron beam systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2903-2906

  Lee, Yongjae ^a   Lee, Woojin ^a   Chun, Kukjin ^a   Kim, Hoseob ^b  

^a Seoul National University   (South Korea)

^b SunMoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033269520     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591093     Document Type: Article

References (13)

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