Rare earth focused ion beam implantation utilizing Er and Pr liquid alloy ion sources

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2791-2794

  Chao, L C ^a   Lee, B K ^a   Chi, C J ^a   Cheng, J ^a   Chyr, I ^a   Steckl, A J ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033267609     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591067     Document Type: Article

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