메뉴 건너뛰기




Volumn 39, Issue 11, 1999, Pages 1691-1696

Long term noise measurements and median time to failure test for the characterization of electromigration in metal lines

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTROMIGRATION; FAILURE ANALYSIS; SPURIOUS SIGNAL NOISE;

EID: 0033221986     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(99)00174-2     Document Type: Article
Times cited : (7)

References (11)
  • 1
    • 0031235274 scopus 로고    scopus 로고
    • Noise and fluctuations in submicrometric Al-Si interconnect lines
    • Neri B., Ciofi C., Dattilo V. Noise and fluctuations in submicrometric Al-Si interconnect lines. IEEE Trans. El. Dev. 44:1997;1454-1459.
    • (1997) IEEE Trans. El. Dev , vol.44 , pp. 1454-1459
    • Neri, B.1    Ciofi, C.2    Dattilo, V.3
  • 2
    • 0026107597 scopus 로고
    • Ultra low noise preamplifier for low frequency noise measurements in electron devices
    • Neri B., Pellegrini B., Saletti R. Ultra low noise preamplifier for low frequency noise measurements in electron devices. IEEE Trans. Instr. Meas. 40:1991;2-6.
    • (1991) IEEE Trans. Instr. Meas , vol.40 , pp. 2-6
    • Neri, B.1    Pellegrini, B.2    Saletti, R.3
  • 4
    • 0031188355 scopus 로고    scopus 로고
    • Characterization of Al-Si-Cu metal lines by means of TEM analysis and the SARF technique
    • Ciofi C., Franzese M., Neri B. Characterization of Al-Si-Cu metal lines by means of TEM analysis and the SARF technique. Microel. Reliab. 37:1997;1079-1085.
    • (1997) Microel. Reliab , vol.37 , pp. 1079-1085
    • Ciofi, C.1    Franzese, M.2    Neri, B.3
  • 5
    • 0024481529 scopus 로고
    • A study of electromigration in aluminum and aluminum-silicon thin film resistors using noise technique
    • Diligenti A., Bagnoli P.E., Neri B., Bea S., Mantellassi L. A study of electromigration in aluminum and aluminum-silicon thin film resistors using noise technique. Solid State El. 32:1989;11-16.
    • (1989) Solid State El , vol.32 , pp. 11-16
    • Diligenti, A.1    Bagnoli, P.E.2    Neri, B.3    Bea, S.4    Mantellassi, L.5
  • 6
    • 0026928451 scopus 로고
    • Prediction of electromigration failure in W/Al-Cu multilayer metallizations by 1/f noise measurements
    • Çelik-Butler Z., Ye Min. Prediction of electromigration failure in W/Al-Cu multilayer metallizations by 1/f noise measurements. Solid State El. 35:1992;1209-1212.
    • (1992) Solid State El , vol.35 , pp. 1209-1212
    • Çelik-Butler, Z.1    Ye, M.2
  • 7
    • 0023456307 scopus 로고
    • Electromigration and low frequency resistance fluctuations in aluminum thin film interconnections
    • Neri B., Diligenti A., Bagnoli P.E. Electromigration and low frequency resistance fluctuations in aluminum thin film interconnections. IEEE Trans. El. Dev. ED34:1987;2317-2322.
    • (1987) IEEE Trans. El. Dev , vol.34 , pp. 2317-2322
    • Neri, B.1    Diligenti, A.2    Bagnoli, P.E.3
  • 8
    • 85031536149 scopus 로고
    • Standard guide for the design of flat, Straight-line test structures for detecting metallization open-circuit or resistance-increase failure due to electromigration
    • ASTM Standard F 1259-89
    • ASTM Standard F 1259-89. Standard guide for the design of flat, Straight-line test structures for detecting metallization open-circuit or resistance-increase failure due to electromigration. Annual book of ASTM Standards. 1989;10.04.
    • (1989) Annual Book of ASTM Standards , pp. 1004
  • 9
    • 0031200284 scopus 로고    scopus 로고
    • Ultra low noise PC based measurement system for the characterization of the metallizations of integrated circuits
    • Ciofi C., De Marinis M., Neri B. Ultra low noise PC based measurement system for the characterization of the metallizations of integrated circuits. IEEE Trans. Instr. Meas. 46:1997;789-793.
    • (1997) IEEE Trans. Instr. Meas , vol.46 , pp. 789-793
    • Ciofi, C.1    De Marinis, M.2    Neri, B.3
  • 11
    • 0018541472 scopus 로고
    • Application of the current noise technique to the investigation on dislocations in metal during plastic deformation
    • Bertotti G., Celasco M., Fiorillo F., Mazzetti P. Application of the current noise technique to the investigation on dislocations in metal during plastic deformation. J. Appl. Phys. 50:1979;6948-6955.
    • (1979) J. Appl. Phys , vol.50 , pp. 6948-6955
    • Bertotti, G.1    Celasco, M.2    Fiorillo, F.3    Mazzetti, P.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.