The thermally balanced bridge technique (TBBT) : A new high resolution resistometric measurement technique for the study of electromigration-induced early resistance changes in metal stripes

Microelectronics Reliability

Volumn 37, Issue 10-11, 1997, Pages 1483-1486

  Van Olmen, J ^a   De Ceuninck, W ^a,b   De Schepper, L ^a,b   Goldoni, A ^c   Cervini, A ^c   Fantini, F ^c  

^a HASSELT UNIVERSITY   (Belgium)

^b DESTIN NV   (Belgium)

^c UNIVERSITY OF PARMA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC RESISTANCE MEASUREMENT; ELECTRONS; FAILURE ANALYSIS;

HIGH RESOLUTION RESISTOMETRIC MEASUREMENT TECHNIQUE; THERMALLY BALANCED BRIDGE TECHNIQUE;

ELECTROMIGRATION;

EID: 0031249186     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(97)00091-7     Document Type: Article

References (6)

1. P.R. Besser, M.C. Madden and P.A. Flinn, J. Appl. Phys., Vol.72, no. 8(1992)
2. J. Niehof, Electromigration ERC modelling, Phd thesis, Univ. Twente(1994)
3. European Patent (EP 0395 149 A1), W.A. De Ceuninck, L. De Schepper, L. Stals and J. Roggen
4. W.A. De Ceuninck, V. D'Haeger, J. Van Olmen, A. Witvrouw, K. Maex and L. De Schepper, Microel. and Rel., Accepted for publication(1997)
5. 'Thermally Balanced Bridge Technique' European Patent pending
6. A. Scorzoni, I. De Munari, F. Tamarri, A. Garulli and F. Fantini, ESREF Proc. 96, p.1691 (1996)