Extension of the nonlocal approach to evaluate the electron velocity distribution

IEEE Transactions on Plasma Science

Volumn 27, Issue 5, 1999, Pages 1271-1278

  Schmidt, Martin ^a   Uhrlandt, Dirk ^a   Winkler, Rolf ^a  

^a Inst of Nonisothermal Plasmaphysics   (Germany)

Author keywords

Direct current column plasma; Electron velocity distribution; Kinetic equation

Indexed keywords

APPROXIMATION THEORY; ELECTRIC SPACE CHARGE; ELECTRONS; EQUATIONS OF MOTION; KINETIC THEORY OF GASES;

ELECTRON VELOCITY DISTRIBUTION;

PLASMA CONFINEMENT;

EID: 0033204536     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.799803     Document Type: Article

References (21)

1. U. Kortshagen, C. Busch, and L. D. Tsendin, "On simplifying approaches to the solution of the boltzmann equation in spatially inhomogeneous plasmas," Plasma Sources Sci. Technol., vol. 5, pp. 1-17, 1996.
2. U. Kortshagen and L. D. Tsendin, "Fast two-dimensional self-consistent kinetic modeling of low-pressure inductively coupled RF discharge," Appl. Phys. Lett., vol. 65, no. 11, pp. 1355-1357, 1994.
3. V. I. Kolobov and W. N. G. Hitchon, "Electron distribution function in a low-pressure inductively coupled plasma," Phys. Rev. E, vol. 52, pp. 972-980, 1995.
4. J. Behnke, Yu. B. Golubovskii, S. U. Nisimov, and I. A. Porokhova, "Self-consistent model of a positive column in an inert gas discharge at low pressure and small currents," Contrib. Plasma Phys., vol. 36, pp. 75-84, 1996.
5. I. B. Bernstein and T. Holstein, "Electron energy distribution in stationary discharges," Phys. Rev., vol. 94, no. 6, pp. 1475-1482, 1954.
6. L. D. Tsendin, "Energy distribution of electrons in a weakly ionized current-carrying plasma with a transverse inhomogeneity," Sov. Phys. JETP, vol. 39, no. 5, pp. 805-810, 1974.
7. V. I. Kolobov and V. A. Godyak, "Nonlocal electron kinetics in collisional gas discharge plasmas," IEEE Trans. Plasma Sci., vol. 23, pp. 503-531, Aug. 1995.
8. R. Winkler, G. Petrov, F. Sigeneger, and D. Uhrlandt, "Strict calculation of electron energy distribution functions in inhomogeneous plasmas," Plasma Sources Sci. Technol., vol. 6, pp. 118-132, 1997.
9. D. Uhrlandt and R. Winkler, "Radial structure of the kinetics and production of electrons in the dc column plasma," Plasma Chem. Plasma Process., vol. 16, no. 4, pp. 517-545, 1996.
10. R. Winkler and D. Uhrlandt, "On the radial structure of the electron velocity distribution and related macroscopic properties in dc column plasmas," in Electron Kinetics and Applications of Glow Discharges, U. Kortshagen and L. D. Tsendin, Eds., vol. 369 of NATO ASI, pp. 119-136. New York: Plenum, 1998.
11. S. Pfau, J. Rohmann, Uhrlandt, and R. Winkler, "Experimental and theoretical study of the inhomogeneous electron kinetics in the dc column plasma," Contrib. Plasma Phys., vol. 36, no. 4, pp. 449-169, 1996.
12. L. D. Tsendin and Yu. B. Golubovskii, "Positive column of a lowdensity, low-pressure discharge, i. electron energy distribution," Sov. Phys. Tech. Phys., vol. 22, no. 9, pp. 1066-1073, 1977.
13. I. K. Kaganovich and L. D. Tsendin, "The space-time-averaging procedure and modeling of the RF discharge, part ii: Model of collisional low-pressure RF discharge," IEEE Trans. Plasma Sci., vol. 20, pp. 66-75, Apr. 1992.
14. L. L. Alves, G. Gousset, and C. M. Ferreira, "Self-contained solution to the spatially inhomogeneous electron boltzmann equation in a cylindrical plasma column," Phys. Rev. E, vol. 55, pp. 890-909, 1997.
15. U. Kortshagen, "Electron and ion distribution functions in RF and microwave plasmas," Plasma Sources Sci. Technol., vol. 4, pp. 172-182, 1995.
16. "Experimental evidence on the nonlocality of the electron distribution function," Phys. Rev. E, vol. 49, no. 5, pp. 4369-1380, 1994.
17. U. Kortshagen, I. Pukropski, and L. D. Tsendin, "Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled RF discharge," Phys. Rev. E, vol. 51, no. 6, pp. 6063-6078, 1995.
18. Yu. B. Golubovskii, V. O. Nekuchaev, and I. A. Porokhova, "Electron kinetics in inhomogeneous and stratified positive column and anode region," in Electron Kinetics and Applications of Glow Discharges, U. Kortshagen and L. D. Tsendin, Eds., vol. 369 of NATOAS1, pp. 137-160. New York: Plenum, 1998.
19. C. Busch and U. Kortshagen, "Numerical solution of the spatially inhomogeneous boltzmann equation and verification of the nonlocal approach for an argon plasma," Phys. Rev. E, vol. 51, no. 1, pp. 280-289, 1995.
20. U. Kortshagen, G. J. Parker, and J. E. Lawler, "Comparison of monte carlo simulations and nonlocal calculations of the electron distribution function in a positive column plasma," Phys. Rev. E, vol. 54, pp. 6746-6761, 1996.
21. L. D. Tsendin, "Electron kinetics in nonuniform glow discharge plasmas," Plasma Sources Sci. Technol., vol. 4, pp. 200-211, 1995.