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Physical Review E

Volumn 52, Issue 1, 1995, Pages 972-980

Electron distribution function in a low-pressure inductively coupled plasma

(2) Kolobov, V I a Hitchon, W N G a

a UNIVERSITY OF WISCONSIN MADISON (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000186357 PISSN: 1063651X EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevE.52.972 Document Type: Article

Times cited : (57)

References (24)

1
- 84927810530
- M.A. Lieberman and R.A. Gottscho, Physics of Thin Films, edited by M. Francombe and J. Vossen (Academic, New York, 1994), Vol. 18, pp. 1 119.

2
- 84951075359
- Novel radio-frequency induction plasma processing techniques
- (1993) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.11 , pp. 2487
- Keller, J.H.¹ Foster, J.C.² Barnes, M.S.³

3
- 0000975851
- Two-dimensional modeling of high plasma density inductively coupled sources for materials processing
- (1994) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.12 , pp. 461
- Ventzek, P.L.G.¹ Hoekstra, R.J.² Kushner, M.J.³

4
- 0000643544
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1355
- Kortshagen, U.¹ Tsendin, L.D.²

5
- 14544281839
- (1994) Appl. Phys. Lett. , vol.65 , pp. 537
- Kolobov, V.I.¹ Beale, D.F.² Mahoney, L.J.³ Wendt, A.E.⁴

6
- 36149002965
- (1954) Phys. Rev. , vol.94 , pp. 1475
- Bernstein, I.B.¹ Holstein, T.²

7
- 0001510516
- (1974) Sov. Phys. JETP , vol.39 , pp. 805
- Tsendin, L.D.¹

8
- 0017531588
- (1977) Sov. Phys. Tech. Phys. , vol.22 , pp. 1066
- Tsendin, L.D.¹ Golubovsky, Yu.B.²

9
- 0001588520
- (1992) Phys. Rev. A , vol.46 , pp. 7837
- Kolobov, V.I.¹ Tsendin, L.D.²

10
- 0026847210
- (1992) IEEE Trans. Plasma Sci. , vol.20 , pp. 66
- Kaganovich, I.D.¹ Tsendin, L.D.²

11
- 0000332657
- (1994) Phys. Rev. E , vol.49 , pp. 4369
- Kortshagen, U.¹

12
- 84927824989
- D.F. Beale, W.N.G. Hitchon, V.I. Kolobov, and A.E. Wendt, Proceedings of the 47th Annual Gaseous Electronics Conference, October, 1994, Gaithersburg, Maryland
- (1994) Bull. Am. Phys. Soc., Ser. II , vol.39 , pp. 1489

13
- 36449005529
- (1994) Appl. Phys. , vol.76 , pp. 2048
- Kortshagen, U.¹ Pukropski, I.² Zethoff, M.³

14
- 0003527658
- Wiley, New York
- (1980) Fundamentals of Plasma Physics
- Golant, V.E.¹ Zhilinsky, A.P.² Sakharov, I.E.³ Brown, S.C.⁴

15
- 0003681270
- Addison Wesley, Reading, MA
- (1966) The Particle Kinetics of Plasmas
- Shkarofsky, I.P.¹ Johnston, T.W.² Bachynsky, M.P.³

16
- 3343015590
- (1993) Phys. Rev. Lett. , vol.71 , pp. 1844
- Turner, M.M.¹

17
- 36149028331
- (1994) Plasma Sources Sci. Technol. , vol.3 , pp. 169
- Godyak, V.A.¹ Piejak, R.B.² Alexandrovich, B.M.³

18
- 84927810529
- Vahedi, V.¹ DiPeso, G.² Lieberman, M.A.³ Rognlien, T.D.⁴ Hewett, D.⁵

19
- 0000043335
- (1995) Phys. Rev. E , vol.51 , pp. 280
- Busch, C.¹ Kortshagen, U.²

20
- 0039783884
- (1995) Comput. Phys. Commun. , vol.85 , pp. 167
- Kramer, K.M.¹ Hitchon, W.N.G.²

21
- 0000915643
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3137
- Godyak, V.A.¹ Piejak, R.B.²

22
- 36549097289
- (1988) J. Appl. Phys. , vol.64 , pp. 4375
- Goedde, C.E.¹ Lichtenberg, A.J.² Lieberman, M.A.³

23
- 0345478672
- (1983) Sov. Phys. JETP , vol.57 , pp. 310
- Vas'kov, V.V.¹ Gurevich, A.V.² Dimant, Ya.S.³

24
- 84927810528
- T.D. Rognlien, R.H. Cohen, G.J. DiPeso, V. Vahedi, and D.W. Hewett, Proceedings of the 47th Annual Gaseous Electronics Conference, October, 1994, Gaithersburg, Maryland
- (1994) Bull. Am. Phys. Soc., Ser. II , vol.39 , pp. 1414

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.