The Space-Time-Averaging Procedure and Modeling of the RF Discharge, Part II: Model of Collisional Low-Pressure RF Discharge

IEEE Transactions on Plasma Science

Volumn 20, Issue 2, 1992, Pages 66-75

  Kaganovich, Igor D ^a   Tsendin, Lev D ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; MATHEMATICAL TECHNIQUES--APPLICATIONS; PLASMAS--SHEATHS; RELAXATION PROCESSES;

RF DISCHARGES;

ELECTRIC DISCHARGES;

EID: 0026847210     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.134026     Document Type: Article

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