Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures

IEEE Transactions on Plasma Science

Volumn 27, Issue 5, 1999, Pages 1339-1347

  Berezhnoi, Stanislav V ^a   Kaganovich, Igor D ^a   Misina, Martin ^a   Bogaerts, Annemie ^a   Gijbels, Renaat ^a  

^a University of Houston   (United States)

Author keywords

Nonlocal ionization by secondary electrons; Radio frequency capacitively coupled discharge

Indexed keywords

COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRONS; IONIZATION OF GASES; MATHEMATICAL MODELS; PLASMA DENSITY;

RADIO FREQUENCY CAPACITIVELY COUPLED PLASMAS;

PLASMA SIMULATION;

EID: 0033204511     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.799810     Document Type: Article

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