Ion Bombardment Secondary Electron Maintenance of Steady RF Discharge

IEEE Transactions on Plasma Science

Volumn 14, Issue 2, 1986, Pages 112-123

  Godyak, V A ^a   Khanneh, A S ^b  

^a GTE Lighting Products ^*  (United States)

^b NONE   (Jordan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS - EMISSION; GASES - IONIZATION;

ION BOMBARDMENT; RF DISCHARGES; SECONDARY ELECTRONS;

ELECTRIC DISCHARGES;

EID: 0022703125     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/TPS.1986.4316513     Document Type: Article

References (24)

1. A. C. Eckbreth and J. W. Davis, “RF augmentation in CO 2 closed-cycle DC electric-discharge convection laser,” Appl. Phys. Lett., vol. 21, pp. 25–27, 1972.
2. C. O. Brown and J. W. Davis, “Closed-cycle performance of a high power electric-discharge laser,” Appl. Phys. Lett., vol. 21, pp. 480–481, 1972.
3. E. L. Latush, V. S. Makhalevskii, M. F. Sem, G. N. Tolmachov, and V. Ya. Khasilev, “Metal-ion transition laser with transverse HF excitation,” Pis'ma Zh. Eksp. Teor. Fiz., vol. 24, pp. 81–83, 1976; also JETP Lett., vol. 24, pp. 69–71, 1976.
4. S. M. Levitskii, “An investigation of the sparking potential of a HF discharge in a gas in the transition range of frequencies and pressures,” Zh. Tekh. Fiz, vol. 27, pp. 1001–1007, 1957; also Sov. Phys.—Tech. Phys., vol. 2, pp. 887–893, 1957.
5. N. A. Yatsenko, “On existence of two regimes of the capacitance RF discharge,” Tr. Mosk. Fiz. Tekh. Inst., Ser. Obsch i Mol. Fiz., vol. 10, pp. 166–170, 1978 (in Russian).
6. N. A. Yatsenko, “Medium-pressure high-current high-frequency capacitive discharge,” Zh. Tekh. Fiz, vol. 50, pp. 2480–2481, 1980; also Sov. Phys.—Tech. Phys., vol. 25, pp. 1454–1455, 1980.
7. V. A. Godyak and A. A. Kuzovnikov, “Rectifying properties of RF discharge,” Fiz. Plazmy, vol. 1, pp. 496–503, 1975; also Sov. J. Plasma Phys., vol. 1, pp. 276–280, 1975.
8. V. A. Godyak, “Steady-state low-pressure RF discharge,” Fiz. Plazmy, vol. 2, pp. 141–151, 1976; also Sov. J. Plasma Phys., vol. 2, pp. 78–84, 1976.
9. V. A. Godyak and A. S. Khanneh, “Influence of self-field on the spatial distribution of a plasma of an RF discharge,” Fiz, Plazmy, vol. 5, pp. 670–677, 1979; also Sov. J. Plasma Phys., vol. 5, pp. 376–380, 1979.
10. V. A. Godyak and A. S. Khanneh, “Collisional RF discharge,” Fiz. Plazmy, vol. 6, pp. 676–683, 1979; also Sov. J. Plasma Phys., vol. 6, pp. 372–376, 1979.
11. V. L. Granovskii, Electric Currents in Gases. Moscow: Nauka, 1971 (in Russian).
12. N. N. Khristov, “Ionization avalanche in the cathode dark space of a cold-cathode glow discharge,” Fiz. Plazmy, vol. 6, pp. 436–439, 1980; also Sov. J. Plasma Phys., vol. 6, pp. 239–241, 1980.
13. J. Wilhelm and W. Kind, “On the theory of a cathode glow of a low pressure discharge,” Beitr. Plasmaphys., vol. 5, pp. 395–403, 1965 (in German).
14. V. Ya. Khasilev, V. S. Mikhalevskii, and G. N. Tolmachov, “Fast electrons in a transverse RF discharge,” Fiz. Plazmy, vol. 6, pp. 430–435, 1980; also Sov. J. Plasma Phys., vol. 6, pp. 236–239, 1980.
15. K.B. Persson, “Inertia-controlled ambipolar diffusion,” Phys Fluids, vol. 5, pp. 1625–1632, 1962.
16. S. A. Self and H. N. Ewald, “Static theory of a discharge column at intermediate pressures,” Phys. Fluids, vol. 9, pp. 2486–2492, 1966.
17. V. A. Godyak, “Modified Bohm criterion for a collisional plasma,” Phys. Lett., vol. 89A, pp. 80–81, 1982.
18. V. M. Zakharova, Yu. M. Kagan, K. S. Mustafin and V. I. Perel, “Probe measurement at medium pressures,” Zh. Tekh. Fiz, vol. 30, pp. 422–429, 1960; also Sov. Phys.—Tech. Phys., vol. 5, pp. 411-418, 1960.
19. R. R. J. Gagne and A. Cantin, “Investigation of an RF plasma with symmetrical and asymmetrical electrostatic probes,” J. Appl. Phys., vol. 43, pp. 2639–2647, 1972.
20. V. A. Godyak and O. A. Popov, “Probe diagnostics of an RF plasma,” Zh. Tekh. Fiz., vol. 47, pp. 766–771, 1977; also Sov. Phys.—Tech. Phys., vol. 22, pp. 461–464, 1977.
21. V. A. Godyak and S. N. Ox, “Finite thickness effect of probe sheath in RF plasma probe diagnostics,” J. de Physique, vol. 40, C-7, pp. 807–808, 1979.
22. V. S. Egorov, “Reactions with metastable atoms and molecular ions of rare gases in pulsed discharge,” in Spectroscopy of Gas Discharge Plasma, vol. 2. Leningrad: Leningrad State Univ., 1980, pp. 53–80 (in Russian).
23. V. A. Ivanov, “The investigation of dissociative recombination of molecular ions,” in Spectroscopy of Gas Discharge Plasma. Leningrad: Leningrad State Univ., 1980, pp. 81–121 (in Russian).
24. V. M. Zakharova, Yu. M. Kagan, and V. I. Perel, “Positive column of a discharge in diffusion regime,” Izv. AN USSR, Fiz., vol. 23, pp. 999–1003, 1959.