The Space-Time-Averaging Procedure and Modeling of the RF Discharge

IEEE Transactions on Plasma Science

Volumn 19, Issue 2, 1991, Pages 130-140

  Smirnov, Alexander S ^a   Tsendin, Lev D ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

IONIZATION; MATHEMATICAL TECHNIQUES--NUMERICAL ANALYSIS; PLASMAS--SHEATHS;

RF DISCHARGES; SPACE-TIME AVERAGING;

ELECTRIC DISCHARGES;

EID: 0026142551     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.106806     Document Type: Article

References (24)

1. L. A. Newman and R. A. Hart, “Recent advances in sealed-off CO2-lasers,” lasers,” Laser FocuslElectro-Optics. 23 6, 80, 1987.
2. N. G. Einspruch and D. Brown, Eds., Plasma Processing for VLSI. New York: Academic, 1984.
3. Yu. Raiser and M. N. Shneider, “The electrode sheath structure in high frequency discharge and transition between its two forms,” Sov. J. Plasma Phys., vol. 13 1195–1203, 1987.
4. A. S. Kovalev, A. T. Rachimov, and V. A. Feoktistov, “HF non-self-sustained gas discharge,” Sov. J. Plasma Phys. 7, 1411–1419, 1981.
5. V. V. Boiko et al., “Numerical modeling of high frequency dis-charge in electronegative gases,” Sov. J. Plasma Phys. 15, 219–224, 1989.
6. M. Kushner, “Monte-Carlo simulation of electron properties in RF discharges,” J. Appl. Phys. 54 4958–4965, 1983.
7. V. A. Godyak and A. S. Khanneh “Collisional RF discharge,” Sov. J. Plasma. Phys. 5 372–376, 1979.
8. J. Boeuf, “Numerical modeling of RF glow discharges,” Phys. Rev. A A61, 81–89, 1987.
9. C. G. Goedde, A. J. Lichtenberg, and M. A. Lieberman, “Self-consistent consistent stochastic electron heating in RF discharges,” J. Appl. 1989.
10. T. J. Sommerer, W. N. G. Hitchon, and J. E. Lawer, “Electron heating mechanisms in He RF glow discharges,” Phys. Rev. Lett. 63 21 2361–2364, 1989.
11. R. W. Boswell and I. J. Morey, “Self-consistent simulation of a parallel-plate RF discharges,” Appl. Phys. Lett. 52 21–23, 1988.
12. D. B. Graves, “Fluid model simulation of a 13.56 MHz RF dis-charges,” Appl. Phys. 62 88–94, 1987.
13. H. Margenau and L. M. Hartman, “Theory of HF gas discharges, II,” Phys. Rev. 73 309–312, 1948.
14. I. Shkarofsky, T. W. Jonston, and M. Bachinski, The Particle Kinetics of Plasma. Reading, MA: Addison—Wesley, 1966.
15. V. L. Ginzburg and A. V. Gurevich, “Nonlinear phenomena in plasma in alternating electric field,” Sov. Phys.—Usp. 70 201–227, 1960.
16. I. B. Bernstein and T. Holstein, “Electron energy distributions in stationary discharges,” Phys. Rev. 94 1475–1482, 1954.
17. L. D. Tsendin, “Electron energy distribution in current-carrying plasma with transverse inhomogeneity,” Sov. Phys. —JETP 39 805–810, 1974.
18. S. M. Levitsky, “An investigation of the sparking potential of a RF discharge,” Sov. Phys.—Tech. Phys. 2 887–889, 1957.
19. G. I. Shapiro and A. M. Soroka, “Forced ambipolar diffusion under influence of RF electric field,” Sov. Phys.—Pisma Tech. Phys. 5, 129–132, 1979.
20. L. D. Tsendin, “Electron motion and average field in electrode sheathes of RF discharge,” Sov. Phys.—Tech. Phys. 35 8 53–58, 1990.
21. Yu. Raizer and M. N. Shneider, “High frequency discharge at intermediate pressures between insulated and bared electrodes,” Sov. J. Plasma Phys. 14 2 226–232, 1988.
22. A. S. Smirnov, “Layers close to electrodes in a capacitive RF discharge,” Sov. Phys.—Tech. Phys. 29 34–36, 1984.
23. N. A. Jatsenko, “The mechanism of RF capactive discharge space structure formation,” Sov. Phys.—Tech. Phys. 33 180–184, 1988.
24. V. A. Godyak and A. S. Khanneh, “Ion bombardment secondary electron maintenance of steady RF discharge,” IEEE Trans. Plasma Sci. PS-14 pp. 112–123, 1986.