Measurement of electron energy distribution in low-pressure RF discharges

Plasma Sources Science and Technology

Volumn 1, Issue 1, 1992, Pages 36-58

  Godyak, V A ^a   Piejak, R B ^a   Alexandrovich, B M ^a  

^a VERIZON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36149029741     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/1/1/006     Document Type: Article

References (81)

1. Ion Bombardment Secondaty Electron Maintenance of Steady RF Discharge
2. Investigation of an rf Plasma with Symmetrical and Asymmetrical Electrostatic Probes
3. Measurements of time varying plasma potential, temperature, and density in a 13.56 MHz radio-frequency discharge
4. Power loss mechanisms in radio frequency dry etching systems
5. Measurement and analysis of radio frequency glow discharge electrical impedance and network power loss
6. In situ simultaneous radio frequency discharge power measurements
7. The influence of the electron transport cross sectional shape on electron energy distribution functions in DC and microwave plasmas
8. Modeling of low-pressure microwave discharges in Ar, He, and O/sub 2/: similarity laws for the maintenance field and mean power transfer