Titanium coating of the inner of a 1 m long narrow tube by double-ended anode coaxial magnetron-pulsed plasmas

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 185-188

  Uchikawa, Y ^a   Sugimoto, S ^a   Kuwahara, K ^a   Fujiyama, H ^a   Kuwahara, H ^b  

^a NAGASAKI UNIVERSITY   (Japan)

^b NISSIN ELECTRIC CO LTD   (Japan)

Author keywords

Co axial magnetron pulsed plasma; Inner sputtering coating; Narrow tube

Indexed keywords

ASPECT RATIO; CONDUCTIVE FILMS; GLASS; MAGNETRON SPUTTERING; PLASMAS; SPUTTER DEPOSITION; THIN FILMS; TITANIUM;

DOUBLE-ENDED ANODE COAXIAL MAGNETRON-PULSED PLASMAS (DCMPP);

METALLIC FILMS;

EID: 0033077331     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00611-2     Document Type: Article

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