Fabrication of 3D microstructures using micro stereolithography (1st report) -A proposal of a new type micro stereolithography and sitnulation of curing shape of resins-

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 64, Issue 8, 1998, Pages 1181-1185

  Ohtsubo, Yoshikazu ^a   Yamamoto, Masahiko ^a   Tadokoro, Satoshi ^a   Takamori, Toshi ^a  

^a NONE

Author keywords

Aberration; Light energy distributions; Micromachine; Microstructure; Stereolithography

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; CURING; LIGHT; MICROSTRUCTURE; OXYGEN; RESINS; SURFACE TENSION;

LIGHT ENERGY DISTRIBUTION; MICROSTEREOLITHOGRAPHY;

LITHOGRAPHY;

EID: 0032138772     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.64.1181     Document Type: Article

References (13)

1. E.W.Becker et. al.: Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA Process), Microelectron. Eng., 4, (1986) 35.
2. K. Ikuta, K. Hirowatari and T. Ogata: Three Dimensional Micro Integrated Fluid System (MIFS) Fabricated by Stereo Lithography. Proc. IEEE Micro Electro Mechanical Systems Workshop, (1994) 1.
3. T.Takagi and N.Nakajima: Architecture Combination by Photoforming Process, Proc. IEEE Micro Electro Mechanical Systems Workshop, (1994) 211.
4. K. Yamaguchi and T.Nakamoto: Consideration on the Accuracy of Fabricating Microstrucutures using UV Laser Induced Polymertrantions, 5th Int. Symp. on Micro Machine and Human Science, (1994) 171.