Soft lithography and microfabrication

Physics World

Volumn 11, Issue 5, 1998, Pages 31-36

  Brittain, Scott ^a   Paul, Kateri ^a   Zhao, Xiao Mei ^a   Whitesides, George ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002849243     PISSN: 09538585     EISSN: None     Source Type: Trade Journal    
DOI: 10.1088/2058-7058/11/5/30     Document Type: Article

References (7)

1. F Cerrina and C Marrian 1996 A path to nanolithography MRS Bulletin December p56
2. LGeppert 1996 Semiconductor lithography for the next millennium IEEE Spectrum April p33
3. J Hu et al. 1997 Using soft lithography to fabricate Ga/As heterostructure field effect transistors Appl. Phys. Lett. 71 2020-2022
4. P F Nealey et al. 1997 Micro-and nanofabrication techniques based on selfassembled monolayers in Molecular Electronics (ed) J Jortner and M Ratner (Blackwell Science, Oxford)
5. A Ulman 1991 Introduction to Thin Organic Films: From Langmuir-Blodgett to Self-Assembly (Academic Press, Boston)
6. YXia and G M Whitesides 1998 Soft lithography Angew. Chem. Int. Ed. Engl. 37 4000
7. X-M Zhao, Y Xia and G M Whitesides 1997 Soft lithographic methods for nanofabrication J. Mater. Chem. 7 1069