Layer-by-layer etching of GaAs (110) with halogenation and pulsed-laser irradiation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 490-493

  Han, B Y ^a   Cha, C Y ^a   Weaver, J H ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032397215     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581048     Document Type: Article

References (20)

1. See C. I. H. Ashby and J. Y. Tsao, Laser Microfabrication, edited by D. J. Ehrlich and J. Y. Tsao (Academic, San Diego, 1989), and references therein.
2. T. J. Chuang, Surf. Sci. Rep. 3, 1 (1983).
3. G. Hasse, V. Liberman, and R. M. Osgood, Jr., J. Vac. Sci. Technol. B 10, 206 (1992).
4. F. A. Houle, Phys. Rev. Lett. 61, 1871 (1988).
5. C. Y. Cha, B. Y. Han, and J. H. Weaver, Surf. Sci. Lett. 381, L636 (1997).
6. N. Itoh K. Hattori, Y. Nakai, J. Kanasaki, A. Okano, C. K. Ong, and G. S. Khoo, Appl. Phys. Lett. 60, 3271 (1992); A. Okano, J. Kanasaki, Y. Nakai, and N. Itoh, J. Phys.: Condens. Matter 6, 2697 (1994).
7. N. Itoh K. Hattori, Y. Nakai, J. Kanasaki, A. Okano, C. K. Ong, and G. S. Khoo, Appl. Phys. Lett. 60, 3271 (1992); A. Okano, J. Kanasaki, Y. Nakai, and N. Itoh, J. Phys.: Condens. Matter 6, 2697 (1994).
8. J. Kanasaki, A. Okano, K. Ishikawa, Y. Nakai, and N. Itoh, Phys. Rev. Lett. 70, 2495 (1993).
9. For a recent review, see R. D. Ramsier and J. T. Yates, Jr., Surf. Sci. Rep. 12, 243 (1991).
10. M. Ishii, T. Meguro, T. Sugano, K. Gamo, and Y. Aoyagi, Appl. Surf. Sci. 79/80, 104 (1994).
11. Y. Aoyagi, K. Shinmura, K. Kawasaki, T. Tanaka, K. Gamo, S. Namba, and I. Nakamoto, Appl. Phys. Lett. 60, 968 (1992).
12. M. Balooch, M. Moalen, W.-E. Wang, and A. V. Hamza, J. Vac. Sci. Technol. A 14, 229 (1996).
13. N. D. Spencer, P. J. Goddard, P. W. Davies, M. Kitson, and R. M. Lambert J. Vac. Sci. Technol. A 1, 1554 (1983).
14. J. C. Patrin and J. H. Weaver, Phys. Rev. B 48, 17 913 (1993); J. C. Patrin, Y. Z. Li, M. Chander, and J. H. Weaver, Appl. Phys. Lett. 62, 1277 (1993).
15. J. C. Patrin and J. H. Weaver, Phys. Rev. B 48, 17 913 (1993); J. C. Patrin, Y. Z. Li, M. Chander, and J. H. Weaver, Appl. Phys. Lett. 62, 1277 (1993).
16. C. Y. Cha, J. Brake, B. Y. Han, D. W. Owens, and J. H. Weaver, J. Vac. Sci. Technol. B 15, 605 (1997): B. Y. Han, C. Y. Cha, and J. H. Weaver, Phys. Rev. B 56, 4966 (1997).
17. C. Y. Cha, J. Brake, B. Y. Han, D. W. Owens, and J. H. Weaver, J. Vac. Sci. Technol. B 15, 605 (1997): B. Y. Han, C. Y. Cha, and J. H. Weaver, Phys. Rev. B 56, 4966 (1997).
18. G. C. Tyrrell, D. Marshall, J. Beckman, and R. B. Jackman, J. Phys.: Condens. Matter 3, S179 (1991).
19. C. Su, H.-Q. Hou, G. H. Lee, Z.-G. Dai, W. Luo, M. F. Vernon, and B. E. Bent, J. Vac. Sci. Technol. B 11, 1222 (1993).
20. B. Y. Han and J. H. Weaver (unpublished).