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Volumn 52, Issue 1-2, 1999, Pages 183-186

Nanometric powder of stoichiometric silicon carbide produced in square-wave modulated RF glow discharges

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CERAMIC COATINGS; COMPACTION; DEHYDROGENATION; GLOW DISCHARGES; MORPHOLOGY; NANOSTRUCTURED MATERIALS; OXIDATION; PROTECTIVE COATINGS; SILICON CARBIDE; SINTERING; STOICHIOMETRY;

EID: 0032786345     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00203-6     Document Type: Article
Times cited : (11)

References (13)
  • 4
    • 0040855109 scopus 로고
    • Proceedings of the 39th National Symposium of the American Vacuum Society
    • Proceedings of the 39th National Symposium of the American Vacuum Society, Part I, J. Vac. Sci. Technol A, 1994;11:1119-1141.
    • (1994) J. Vac. Sci. Technol A , vol.11 , Issue.1 PART , pp. 1119-1141


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.