Production of nanometric particles in radio frequency glow discharges in mixtures of silane and methane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 567-571

  Bertram, E ^a   Costa, J ^a   Viera, G ^a   Zhang, R Q ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030525808     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580146     Document Type: Article

References (24)

1. J. Vac. Sci. Technol. A 11, 119 (1994).
2. Plasma Sources Sci. Technol. 3 (1994).
3. E. Bertran, J. Costa, G. Sardin, J. Campmany, J. L. Andújar, and A. Canillas, Plasma Sources Sci. Technol. 3, 348 (1994).
4. J. Costa, G. Sardin, J. Campmany, J. L. Andújar, A. Canillas, and E. Bertran, Mater. Res. Soc. Symp. Proc. 297, 1031 (1993)
5. J. Costa, P. Roura, G. Sardin, J. R. Morante, and E. Bertran, Appl. Phys. Lett. 64, 463 (1994).
6. J. Costa, P. Roura, A. Canillas, E. Pascual, J. R. Morante, and E. Bertran, Thin Solid Films (in press).
7. R. A. Andrievski, J. Mater. Sci. 29, 614 (1994).
8. Y. Watanabe, M. Shiratani, Y. Kubo, I. Ogawa, and S. Ogi, Appl. Phys. Lett. 53, 1263 (1988).
9. J. T. Verdeyen, J. Beberman, and L. J. Overzet, J. Vac. Sci. Technol. A 8, 1851 (1990).
10. A. A. Howling, L. Sansonnens, J.-L. Dorier, and Ch. Hollenstein, J. Phys. D 26, 1003 (1993).
11. A. Lloret, E. Bertran, J. L. Andújar, A. Canillas, and J. L. Morenza, J. Appl. Phys. 69, 632 (1991).
12. J. L. Andújar, E. Bertran, A. Canillas, J. Campmany, J. Serra, C. Roch, and A. Lloret, J. Appl. Phys. 71, 1546 (1991).
13. J. L. Andújar, E. Bertran, A. Canillas, J. Esteve, J. Andreu, and J. L. Morenza, Vacuum 39, 795 (1989).
14. C. M. Horwitz, J. Vac. Sci. Technol. A 1, 1795 (1983).
15. G. Bruno, P. Capezzuto, and G. Cicala, J. Appl. Phys. 69, 7256 (1991).
16. J. Taue, R. Grigorovici, and A. Vancu, Phys. Status Solidi 15, 627 (1966).
17. D. M. Bhusari and S. T. Kshirsagar, J. Appl. Phys. 73, 1743 (1993).
18. H. Wieder, M. Cardona, and R. C. Guarnieri, Phys. Status Solidi 92, 99 (1979).
19. G. Lucovsky, Solid State Commun. 29, 571 (1979).
20. W. Beyer and H. Mell, in Disorder Semiconductor, edited by M. A. Castner, G. A. Thomas, and S. R. Ovshinky (Plenum, New York, 1987), p. 641.
21. Y. Catherine and G. Turban, Thin Solid Films 70, 101 (1980).
22. Y. Inoue, S. Nakashima, A. Mitsuishi, S. Tabata, and S. Tsuboi, Solid State Commun. 48, 1071 (1983).
23. A. Zwick and R. Carles, Phys. Rev. B 48, 6024 (1993).
24. P. V. Huong, Diamond Relat. Mater. 1, 33 (1991).