Production of a-Si1-xCx:H powders using radiofrequency glow discharges of silane and methane mixtures

Materials Research Society Symposium - Proceedings

Volumn 410, Issue , 1996, Pages 173-178

  Costa, J ^a   Viera, G ^a   Zhang, R Q ^a   Andujar, J L ^a   Pascual, E ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; GLOW DISCHARGES; HYDROGEN; METHANE; MICROSTRUCTURE; MIXTURES; OPTICAL PROPERTIES; PARTICLES (PARTICULATE MATTER); POWDERS; SILANES; THERMAL EFFECTS;

RADIO FREQUENCY GLOW DISCHARGES;

SILICON CARBIDE;

EID: 0029716186     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)