Grating couplers using silicon-on-insulator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3620, Issue , 1999, Pages 79-86

  Ang, T W ^a   Reed, G T ^a   Vonsovici, A ^a   Evans, A G R ^a   Routley, P R ^a   Blackburn, T ^a   Josey, M R ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; INTEGRATED OPTICS; ION BEAMS; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; REFRACTIVE INDEX; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THIN FILMS;

BLAZED GRATINGS; SILICON RECTANGULAR GRATINGS; THIN FILM WAVEGUIDES; UNIBOND SILICON ON INSULATOR; WAVEGUIDE GRATING COUPLER;

WAVEGUIDE COUPLERS;

EID: 0032686976     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.343717     Document Type: Conference Paper

References (9)