Method of collecting pure vibrational absorption spectra of amorphous thin films

Thin Solid Films

Volumn 349, Issue 1-2, 1999, Pages 283-288

  Li, Tong ^a   Kanicki, Jerzy ^a   Mohler, Carol ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b DOW CHEMICAL COMPANY   (United States)

Author keywords

Fourier transform infrared spectroscopy; Optical properties; Silicon; Silicon nitride

Indexed keywords

ABSORPTION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OPTICAL PROPERTIES; SILICA; SILICON NITRIDE; THIN FILMS;

VIBRATIONAL ABSORPTION SPECTRA;

AMORPHOUS FILMS;

EID: 0032682189     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0040-6090(99)00193-5     Document Type: Article

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