Overdamped niobium-nitride junctions for 10 k operation

IEEE Transactions on Applied Superconductivity

Volumn 9, Issue 2 PART 3, 1999, Pages 3263-3266

  Akaike, Hiroyuki ^a   Oke, Ryutaro ^a   Aoyama, Takashi ^a   Fujimaki, Akira ^a   Hayakawa, Hisao ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); ELECTRODES; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; NITRIDING; PLASMA APPLICATIONS; REACTIVE ION ETCHING; SUPERCONDUCTING DEVICES; TEMPERATURE;

OVERDAMPED NIOBIUM NITRIDE JUNCTIONS; PLASMA NITRIDATION;

JOSEPHSON JUNCTION DEVICES;

EID: 0032660166     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.783725     Document Type: Article

References (11)

1. O. L. Kerber, J. E. Cooper, H. W. Fry, G. R King, R. S. Morris, J. W. Spargo and A. G. Toth, "An all refractory NbN Josephson junction medium scale integrated circuit process," J. Appl. Phys., vol.68, pp.4853-4860, November 1990.
2. S. L. Thomasson, A. W. Moopen, R. Elmadjian, J. M. Murduck, J. W. Spargo, L. A. Abelson and H. W. Chan, "All refractory NbN integrated circuit process," IEEE Trans. Appl. Supercond., vol.3, pp.2058-2061, March 1993.
3. G. L. Kerber, L. A. Abelson, R. N. Elmadjian, G. Hanaya and E. G. Ladizinsky, "An improved NbN integrated circuit process featuring thick NbN ground plane and lower parasitic circuit inductances," IEEE Trans. Appl. Supercond., vol.7, pp.2638-2643, June 1997.
4. K. K. Likharev and V. K. Semenov, "RSFQ logic/memory family: A new Josephson-junction technology for sub-teraherte-clock-frequency digital systems," IEEE Trans. Appl. Supercond., vol.1, pp.3-28, March 1991.
5. Q. Wang, T. Kikuchi, S. Kohjiro and A. Shoji, "Preparation cif NbCxNi-x Josephson junctions with TiNx barriers," IEEE Trans. Appl. Supercond., vol.7, pp.2801-2804, June 1997.
6. Q. Wang, J. Katsuta, T. Kikuchi, H. Sasaki and A. Shoji, "Properties of nonhysteretk NbCxNi-x Josephson junctions with MgO/TiNx multilayeredbarriers," Ext. Abstr. (ISEC'97); 6thInt. Superconductive Electronics Conf., vol.2 , J67, pp.173-175.
7. H. Yamamori, K. Yoshizawa, A. Fujimaki, and H. Hayakawa, "Fabrication of all-NbN Josephson junctions using semiconductive amorphous NbNx barriers," Supercond. Sei. Technol., vol.9, pp.A30-A33, April 1996.
8. H. Akaike, K. Yoshizawa, R. Oke, A. Fujimaki and H. Hayakawa, "Overdamped NbN junctions wilh NbNx barriers formed by plasma nitridation," Ex.t. Abstr. (ISEC'97); 6th Int. Superconductive Electronics Conf., vol.2 , J62, pp.159-162. Applied Superconductivuy, in press.
9. A. Barone and G. Palerno, Physics and Applications of the Josephson Effects. John Wiley and Sons, 1992.
10. L. I. Glazman and K. A. Matveev, "Inelastic tunneling across thin amorphous films," Sov. Phys. JETP., vol. 67, pp.1276-1282, June 1988.
11. J. Halbritter, "On resonant tunneling in Nb-Nb2O5-diodes," IEEE Trans. Magn., vol. MAG-19, pp.799-802, May 1983.