All refractory nbn integrated circuit process

IEEE Transactions on Applied Superconductivity

Volumn 3, Issue 1, 1993, Pages 2058-2061

  Thomasson, S L ^a   Mooperm, A W ^a   Elmadjian, R ^a   Murduck, J M ^a   Spargo, J W ^a   Abelson, L A ^a   Chan, H W ^a  

^a NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); JOSEPHSON JUNCTION DEVICES; LOGIC CIRCUITS; MAGNETIC MEASURING INSTRUMENTS; NIOBIUM COMPOUNDS; REFRACTORY METAL COMPOUNDS; SPUTTERING; SUPERCONDUCTING MATERIALS; TUNNEL DIODES;

JOSEPHSON TUNNEL JUNCTIONS; SPUTTERED MOLYBDENUM FILMS; SQUIDS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0027560924     PISSN: 10518223     EISSN: 15582515     Source Type: Journal    
DOI: 10.1109/77.233452     Document Type: Letter

References (11)

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