Displacement Measurement by a Microfabricated Tunneling Unit

IEEJ Transactions on Sensors and Micromachines

Volumn 116, Issue 7, 1996, Pages 297-302

  Kobayashi, Dai ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

displacement sensor; electrostatic actuator; micromachining; silicon; vacuum tunneling

Indexed keywords

EID: 85010164494     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.116.297     Document Type: Article

References (6)

1. D. Kobayashi, H. Fujita, “Design, Fabrication and Operation of Micromachined Tunneling Control Unit” Submitted to Trail, of IEE Japan.
2. T. W. Kenny, “Wide-Bandwidth Electromechanical Actuators Cor Tunneling Displacement Transducers”, Technical digest of ASME/IEEE Jour, on, Microelectromechanical Systems Vol.3, pp. 97-104(1994), Napa Valley, CA, U. S. A, pp. 192-196.
3. S. Akimine, et al, “A Planar Process for Microfabrication of a Scanning Tunneling Microscope” Sensors & Actuators, Vol. A21-A24, pp. 964-970, (1990).
4. Y. Xu, S. A. Miller, N. MacDonald, “Microelectromechanical Scanning Tunneling Microscope” Tech. Digest 8th International Conference on Solid-Slate Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 25-29(1995) pp. 640-643.
5. Manabe, “Unified Understanding of Classic Control, Optimal Control, and H-infinity Control”, J. Soc. Instr. and Control Engin., Vol. 30, pp. 941-946 (1991) in Japanese.
6. D. Sarid, “Scanning Force Microscopy”, Oxford Univ. Press, (1991).