Simultaneous optical detection techniques, interferometry, and optical beam deflection for dynamic mode control of scanning force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1539-1542

  Hoummady, M ^a   Farnault, E ^a   Yahiro, T ^a   Kawakatsu, H ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); GRADIENT INDEX OPTICS; INTERFEROMETRY; NATURAL FREQUENCIES; RESONANCE; SCANNING TUNNELING MICROSCOPY;

DYNAMIC MODE CONTROL; NORMAL DISPLACEMENT; OPTICAL BEAM DEFLECTION; OPTICAL DETECTION; SCANNING FORCE MICROSCOPY;

ATOMIC FORCE MICROSCOPY;

EID: 0031191465     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589395     Document Type: Article

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