Adhesion and structural changes of multi-layered and multi-doped a-C:H films during annealing

Diamond and Related Materials

Volumn 5, Issue 9, 1996, Pages 932-937

  Oral, B ^a   Ernst, K H ^a   Schmutz, C J ^b  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

a C:H; Multi dopant; Multi layer: Si:Ti doping

Indexed keywords

EID: 0009427893     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00506-4     Document Type: Article

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