Post-growth modification of amorphous carbon films under ion beam bombardment: Grain size dependence on the film thickness

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 449-453

  Logothetidis, S ^a   Lioutas, Ch B ^a   Gioti, M ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Amorphous carbon; Diamond; RF magnetron sputtering; Transmission electron microscopy

Indexed keywords

CARBON; ION BEAMS; ION BOMBARDMENT; MAGNETRON SPUTTERING; SYNTHETIC DIAMONDS; TRANSMISSION ELECTRON MICROSCOPY;

POST-GROWTH MODIFICATION;

AMORPHOUS MATERIALS;

EID: 0031996182     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00235-5     Document Type: Article

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