Identification and visualization of questionable regions in atomic force microscope images

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 181-185

  Leung, Edward C W ^a   Markiewicz, Peter ^a   Goh, M Cynthia ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000891028     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589261     Document Type: Article

References (13)

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