Dynamics of the excimer laser annealing of hydrogenated amorphous silicon thin films

Applied Physics Letters

Volumn 75, Issue 4, 1999, Pages 498-500

  Ivlev, G ^a   Gatskevich, E ^a   Chab V ^b   Stuchlik J ^b   Vorlicek V ^b   Kocka J ^b  

^a B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY MEASUREMENT; EXCIMER LASERS; LASER PULSES; MELTING; RAMAN SPECTROSCOPY; THIN FILMS;

HYDROGENATED AMORPHOUS SILICON; LASER ANNEALING; TIME-RESOLVED CONDUCTIVITY (TRC) SPECTROSCOPY; TIME-RESOLVED REFLECTIVITY (TRR) SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 0032607019     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124428     Document Type: Article

References (14)

1. C. E. Nebel and M. Stutzmann (eds.), Phys. Status Solidi A 166, 541 (1998).
2. K. M. A. El-Kader, I. Ulrych, V. Cháb, J. Oswald, P. Kubát, P. Engst, J. Stuchlik, A. Fejfar, R. Černý, I. Pelant, and J. Kočka, Thin Solid Films 255, 302 (1995).
3. Y. He, Ch. Yin, G. Cheng, L. Wang, and X. Liu, J. Appl. Phys. 75, 797 (1994).
4. T. Sameshima and S. Usui, J. Appl. Phys. 70, 1281 (1991).
5. K. Winer, G. B. Anderson, S. E. Ready, R. Z. Bachrach, R. I. Johnson, F. A. Ponce, and J. B. Boyce, Appl. Phys. Lett. 57, 2222 (1990).
6. C.-D. Kim, R. Ishihara, and M. Matsumura, Jpn. J. Appl. Phys., Part 1 34, 5971 (1995).
7. Zh. Xu, I. Dai, Ch. Wang, Sh. Zhang, Ch. An, and X. Li, Phys. Status Solidi A 164, R7 (1997).
8. R. Čemý, V. Vydra, P. Přikryl, I. Ulrych, J. Kočka, K. M. A. El-Kader, Z. Chvoj, and V. Cháb, Appl. Surf. Sci. 86, 359 (1995).
9. S. Hamma and P. Roca i Cabarrocas, J. Appl. Phys. 81, 7282 (1997).
10. O. Borusík, R. Černý, P. Přikryl, K. M. A. El-Kader, I. Ulrych, Z. Chvoj, and V. Cháb, Appl. Surf. Sci. 109/110, 317 (1997).
11. V. M. Glazov, S. N. Chizhevskaya, and N. N. Glagoleva, Liquid Semiconductors (Plenum, New York, 1969), p. 117.
12. M. Goerlitzer, P. Torres, N. Beck, N. Wyrsch, N. Keppner, J. Pohl, and A. Shah, J. Non-Cryst. Solids 227-230, 996 (1998).
13. D. L. Staebler and C. R. Wronski, J. Appl. Phys. 51, 3262 (1980).
14. B. Rezek, J. Stuchlík, A. Fejfar, and J. Kočka, Appl. Phys. Lett. 74, 1475 (1999).