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Volumn 227-230, Issue PART 2, 1998, Pages 996-1000
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Structural properties and electronic transport in intrinsic microcrystalline silicon deposited by the VHF-GD technique
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Author keywords
Microcrystalline; Silicon; Stability; Structure; Transport properties
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Indexed keywords
CRYSTAL STRUCTURE;
DEPOSITION;
ELECTRON TRANSPORT PROPERTIES;
FERMI LEVEL;
GLOW DISCHARGES;
PHOTOCONDUCTIVITY;
SEMICONDUCTING SILICON;
HOLE MOBILITY;
MICROCRYSTALLINE MATERIALS;
SEMICONDUCTING FILMS;
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EID: 0032065120
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(98)00257-9 Document Type: Article |
Times cited : (46)
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References (9)
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