Conductivity of a-Si:H films irradiated by excimer laser with low energy density

Physica Status Solidi (A) Applied Research

Volumn 164, Issue 2, 1997, Pages

  Xu, Zhong Yang ^a   Dai, Yong Bing ^a   Wang, Chang An ^a   Zhang, Shao Qiang ^a   An, Cheng Wu ^a   Li, Xing Jiao ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; CURRENT DENSITY; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC RESISTANCE MEASUREMENT; EXCIMER LASERS; HYDRATES; LASER PULSES; SEMICONDUCTING SILICON; SUBSTRATES; THIN FILM TRANSISTORS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); SOLID PHASE CRYSTALLIZATION (SPC) PROCESS;

AMORPHOUS FILMS;

EID: 0031380882     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(199712)164:23.0.CO;2-6     Document Type: Article

References (7)