Laser crystallization and structural characterization of hydrogenated amorphous silicon thin films

Journal of Applied Physics

Volumn 85, Issue 11, 1999, Pages 7914-7918

  Toet, D ^a   Smith, P M ^a   Sigmon, T W ^a   Takehara, T ^b   Tsai, C C ^b   Harshbarger, W R ^b   Thompson, M O ^c  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b Applied Komatsu Technology   (United States)

^c Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; FILM GROWTH; GRAIN SIZE AND SHAPE; LASER APPLICATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; THIN FILM TRANSISTORS; THIN FILMS;

HYDROGENATED AMORPHOUS SILICON FILMS; LASER CRYSTALLIZATION;

SEMICONDUCTING FILMS;

EID: 0032606417     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370607     Document Type: Article

References (30)

1. T. Sameshima, M. Hara, and S. Usui, Jpn. J. Appl. Phys., Part 1 28, 1789 (1989).
2. N. Yamauchi and R. Reif, J. Appl. Phys. 75, 3235 (1994).
3. F. Emoto, K. Senda, E. Fujii, A. Nakamura, A. Yamamoto, Y. Uemoto, K. Kobayashi, M. Kyougoku, T. Kamimura, and G. Kano, Conference Record of the 9th International Display Research Conference (Society for Information Display, Playa del Rey, CA, 1989), p. 152.
4. H. Hovagimian, J. Mehlhaff, and S. Oresman, Conference Record of the 17th International Display Research Conference (Society for Information Display, Santa Ana, CA, 1997), p. M-53.
5. R. Ishihara and M. Matsumura, Jpn. J. Appl. Phys., Part 1 36, 6167 (1997).
6. M. A. Crowder, P. G. Carey, P. M. Smith, R. S. Sposili, H. S. Cho, and J. S. Im, IEEE Electron Device Lett. 19, 309 (1998).
7. G. K. Giust, T. W. Sigmon, P. G. Carey, B. Weiss, and G. A. Davis, IEEE Electron Device Lett. 19, 343 (1998).
8. A. J. Snell, K. D. McKenzie, W. E. Spear, P. G. LeComber, and A. J. Hughes, Appl. Phys. 24, 357 (1981).
9. T. Sameshima and S. Usui, Mater. Res. Soc. Symp. Proc. 71, 435 (1986).
10. S. D. Brotherton, D. J. McCulloch, J. B. Clegg, and J. P. Gowers, IEEE Trans. Electron Devices 40, 407 (1993).
11. P. M. Smith, P. G. Carey, and T. W. Sigmon, Appl. Phys. Lett. 70, 342 (1997).
12. H. Fritzsche, Sol. Energy Mater. 3, 447 (1980).
13. W. Paul and D. A. Anderson, Sol. Energy Mater. 5, 229 (1981).
14. R. B. Bergmann, G. Oswald, M. Albrecht, and J. H. Werner, Solid State Phenom. 51-52, 515 (1996).
15. J. G. Maillou, E. L. Mathé, J. C. Desoyer, S. de Unamuno, and E. Fogarassy, Appl. Surf. Sci. 43, 150 (1989).
16. S. Miyata, M. Furuta, T. Yoshioka, and T. Kawamura, J. Appl. Phys. 73, 3271 (1994).
17. P. Mei, J. B. Boyce, M. Hack, R. A. Lujan, R. I. Johnson, G. B. Anderson, D. K. Fork, and S. E. Ready, J. Appl. Phys. 64, 1132 (1994).
18. K. Law, J. White, and N. Turner, Digest of Technical Papers (Society for Information Display, Santa Clara, CA, 1995), p. 67.
19. R. A. Street, Hydrogenated Amorphous Silicon (Cambridge University Press, Cambridge, U.K., 1991), p. 47.
20. D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. A. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
21. M. O. Thompson, Ph.D. thesis, Cornell University Press, Ithaca, NY, 1984, p. 61.
22. D. K. Fork, G. B. Anderson, J. B. Boyce, R. I. Johnson, and P. Mei, Appl. Phys. Lett. 68, 2138 (1996).
23. K. Mourges, L. Pichon, F. Raoult, T. Mohammed-Brahim, D. Briand, O. Bonnaud, D. Lemoine, P. Boher, M. Stehlé, and J. L. Stehlé, Mater. Res. Soc. Symp. Proc. 471, 197 (1997).
24. J. S. Im, H. J. Kim, and M. O. Thompson, Appl. Phys. Lett. 63, 1969 (1993).
25. H. Kuriyama, T. Nohda, Y. Aya, T. Kuwahara, K. Wakisaka, S. Kiyama, and S. Tsuda, Jpn. J. Appl. Phys., Part 1 33, 5657 (1994).
26. M. O. Thompson, G. J. Galvin, J. W. Mayer, P. S. Peercy, J. M. Poate, D. C. Jacobsen, A. G. Cullis, and N. G. Chew, Phys. Rev. Lett. 52, 2360 (1994).
27. S. R. Stiffler and M. O. Thompson, Phys. Rev. Lett. 60, 2519 (1988).
28. R. S. Sposili and J. S. Im, Appl. Phys. Lett 69, 2864 (1996).
29. D. Toet, G. Aichmayr, M. Mulato, P. V. Santos, A. Spangenberg, and R. B. Bergmann, Mater. Res. Soc. Symp. Proc. 467, 337 (1997).
30. D. Toet and P. M. Smith (unpublished).