Growth mechanisms of (00.1)GaN substrates in the hydride vapour-phase method: surface diffusion, spiral growth, H2 and GaCl3 mechanisms

Journal of Crystal Growth

Volumn 205, Issue 1, 1999, Pages 123-135

  Cadoret, Robert ^a  

^a UNIVERSITÉ BLAISE PASCAL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; COMPUTER SIMULATION; CONDENSATION; DESORPTION; DIFFUSION; EVAPORATION; HYDRIDES; MASS TRANSFER; MATHEMATICAL MODELS; SEMICONDUCTOR GROWTH; SURFACE PHENOMENA; VAPOR PHASE EPITAXY;

GALLIUM NITRIDE; PRE EXPONENTIAL KINETIC FACTORS; SPECIES BALANCE EQUATIONS; SPIRAL GROWTH;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0032598203     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(99)00251-1     Document Type: Article

References (24)

1. Golan Y., Wu X.H., Speck J.S., Vaudo R.P., Phanse V.M. Appl. Phys. Lett. 73:1998;3090.
2. Zhang R., Kuech T.F. Mater. Res. Soc. Symp. Proc. 482:1998;709.
3. Naniwae K., Itoh S., Amani H., Itoh K., Hiramatsu K., Akasaki I. J. Crystal Growth. 99:1990;381.
4. Romano L.T., Krusor B.S., Molnar R.J. Appl. Phys. Lett. 71:1997;2283.
5. Nataf G., Beaumont B., Bouillé A., Haffouz S., Vaille M., Gibart P. J. Crystal Growth. 192:1998;73.
6. Seifert W., Fitzl G., Butter E. J. Crystal Growth. 52:1981;257.
7. Meyyappan M. J. Vac. Sci. Technol. A. 16:1998;685.
8. Cadoret R., Gil-Lafon E. J. Phys. I France. 7:1997;889.
9. Korec J., Heyen J.M. J. Crystal Growth. 60:1982;297.
10. Jurgenssen H., Korec J., Heyen M., Balk P. J. Crystal Growth. 66:1984;73.
11. Walton D. J. Chem. Phys. 37:1962;2182.
12. Glasstone S., Laidler K.J., Eyring H. The Theory of Rate Processes. 1965;McGraw-Hill, New York.
13. Barin I. Thermochemical Data of Pure Substances. 1993;VCH D-6940 Weinheim, Basel, Cambridge, New York.
14. Janaf Thermochemical Tables, 3rd edition, Vol. 14, 1985.
15. Richman D. J. Phys. Chem. Solids. 33:1970;147.
16. Herzberg D. J. Mol. Spec. 33:1970;147.
17. Barrow R.F. Trans. Far. Soc. 56:1960;952.
18. A.G. Gaydon, Dissociation Energies and Spectra of Diatomic Molecules, 3rd edition.
19. Briot O., Chur S., Aulombard R.L. Appl. Phys. Lett. 71:1997;1990.
20. Burton W.K., Cabrera N., Frank F.C. Philos. Trans. Soc. 243:1951;299.
21. H. Banvillet, Thèse Université de Clermont II, 10 Janv. 1992.
22. Cabrera N., Levin M.M. Philos. Mag. 1:1956;450.
23. Jacob G., Boulou M., Furtado M. J. Crystal Growth. 42:1977;136.
24. Cadoret R. Kaldis E. Current Topics in Materials Science. Vol. 5:1980;North-Holland, Amsterdam.