Modeling of GaN hydride vapor phase epitaxy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 685-688

  Meyyappan, M ^a  

^a NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032367282     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581087     Document Type: Article

References (13)

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