In situ Fourier transform infrared spectroscopy near the substrate in tetraethoxysilane/ozone chemical vapor deposition

Electrochemical and Solid-State Letters

Volumn 2, Issue 10, 1999, Pages 527-530

  Whidden, Thomas K ^a,b   Lee, Sun Young ^a  

^a UNIVERSITY OF NEW BRUNSWICK   (Canada)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ACETIC ACID; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OXIDATION; OZONE; SILANES;

FORMIC ACID; TETRAETHOXYSILANE;

CHEMICAL VAPOR DEPOSITION;

EID: 0032594219     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1390892     Document Type: Article

References (30)

1. K. Fujino, Y. Nishimoto, N. Tokumasu, and K. Maeda, J. Electrochem. Soc., 140, 2922 (1993).
2. A. Kubo, T. Homma, and Y. Murao, J. Electrochem. Soc., 143, 1769 (1996).
3. T. Homma, M. Suzuki, and Y. Murao, J. Electrochem. Soc., 140, 3591 (1993).
4. K. Murase, N. Yabumoto, and Y. Komine, J. Electrochem. Soc., 140, 1722 (1993).
5. I. A. Shareef, G. W. Rubloff, and W. N. Gill, J. Vac. Sci. Technol., B, 14, 772 (1996).
6. O. Sanogo and M. R. Zachariah, J. Electrochem. Soc., 144, 2919 (1997).
7. A. M. Wrobel, A. Walkiewicz-Pietrzykowska, M. Stasiak, and J. Kulpinski, Chem. Vap. Deposition, 2, 285 (1996).
8. M. Adachi, K. Okuyama, N. Tohge, M. Shimada, J. Sato, and M. Muroyama, Jpn. J. Appl. Phys., 33, L447 (1994).
9. D. M. Dobkin, S. Mokhtari, M. Schmidt, A. Pant, L. Robinson, and A. Sherman, J. Electrochem. Soc., 142, 2332 (1995).
10. K. Okuyama, T. Fujimoto, and T. Hayashi, Ceram. Proc., 43, 2688 (1997).
11. T. Satake, T. Sorita, H. Fujioka, H. Adachi, and H. Nakajima, Jpn. J. Appl. Phys., 33, 3339 (1994).
12. T. Sorita, S. Shiga, K. Ikuta, Y. Egashiba, and H. Komiyama, J. Electrochem. Soc., 140, 2952 (1993).
13. T. Kawahara, A. Yuuki, and Y. Matsui, Jpn. J. Appl. Phys., 31, 2925 (1992).
14. J. A. Mucha and J. Washington, Mater. Res. Soc. Symp. Proc., 334, 31 (1994).
15. J. Arno, Z. Yuan, and S. Murphy, J. Electrochem. Soc., 146, 276 (1999).
16. W. N. Gill and S. Ganguli, J. Vac. Sci. Technol., B, 15, 948 (1997).
17. http://www.epa.gov/ttnemc01/ftir/epaadata.htm
18. R. West and R. H. Baney, J. Am. Chem. Soc. 81, 6145 (1959).
19. E. D. Lipp, Appl.Spectrosc., 45, 477 (1991).
20. K. Ikeda, S. Nakayama, and M. Maeda, J. Electrochem. Soc., 142, 1659 (1995).
21. M. O. Popovich, G. V. Egorova, and Yu. V. Filippov, Russ. J. Phys. Chem., 59, 165 (1985).
22. R. A. Young, G. Black, and T. G. Slanger, J. Phys. Chem., 49, 4758 (1968).
23. O. Horie, R. Taege, B. Reimann, N. L. Arthur, and P. Potzinger, J. Phys. Chem., 95, 4393 (1991).
24. H. Hoffmeyer, P. Potzinger, and B. Reimann, J. Phys. Chem., 89, 4829 (1989).
25. H. Kwart and K. King, d-Orbitals in the Chemistry of Silicon, Phosphorus, and Sulfur, Springer-Verlag, New York (1977).
26. S. Romet, M. Couturier, and T. Whidden, Unpublished results.
27. P. S. Bailey, Ozonation in Organic Chemistry Vol. I, p. 33, Academic Press, London (1978).
28. K. Kleinermanns and A. C. Luntz, J. Phys. Chem., 77, 3774 (1982).
29. A. Miyoshi, H. Matsui, and Nobuaki, J. Phys. Chem., 93, 5813 (1989).
30. R. D. Cadle and J. W. Powers, J. Phys. Chem., 71, 1702 (1967).