Fourier transform infrared characterization of downstream gas-phase species generated by tetraethylorthosilicate/ozone atmospheric pressure reactions

Journal of the Electrochemical Society

Volumn 146, Issue 1, 1999, Pages 276-280

  Arnó, Josep ^a,b   Yuan, Zheng ^b   Murphy, Shawn ^b  

^a ENTEGRIS INC   (United States)

^b Watkins Johnson Company   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETIC ACID; ATMOSPHERIC COMPOSITION; ATMOSPHERIC PRESSURE; CARBON DIOXIDE; CARBON MONOXIDE; COMPOSITION EFFECTS; DECOMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OZONE; PHASE COMPOSITION; SILICATES; THERMAL EFFECTS;

ATMOSPHERIC PRESSURE REACTIONS; TETRAETHYLORTHOSILICATE;

ATMOSPHERIC CHEMISTRY;

EID: 0032759801     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391599     Document Type: Article

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