Secondary electron imaging of nucleation and growth of semiconductors for nanostructure fabrication

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 262-266

  Homma, Y ^a  

^a NTT Basic Research Laboratories   (Japan)

Author keywords

GaAs; In situ observation; Nucleation; Scanning electron microscopy; Selective growth; Si

Indexed keywords

COALESCENCE; MOLECULAR BEAM EPITAXY; MORPHOLOGY; NUCLEATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH;

SECONDARY ELECTRON IMAGING;

NANOSTRUCTURED MATERIALS;

EID: 0032476311     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01096-7     Document Type: Article

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