SCOPUS 정보 검색 플랫폼

Volumn 135, Issue 1-4, 1998, Pages 318-330

Phase distinction in semi-insulating polycrystalline silicon by pattern recognition of X-ray photoelectron spectroscopy/X-ray-induced auger electron spectroscopy data

(3) Lesiak, Beata a Zemek, Jozef b Jozwik, Adam c

a INSTITUTE OF PHYSICAL CHEMISTRY (Poland)

b INSTITUTE OF PHYSICS (Czech Republic)

c INSTITUTE OF BIOCYBERNETICS AND BIOMEDICAL ENGINEERING (Poland)

Author keywords

kNN fuzzy rule; Pattern recognition method; Quantitative analysis; Semiinsulating polycrystalline silicon; XAES; XPS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; FUZZY SETS; INSULATING MATERIALS; PATTERN RECOGNITION; POLYCRYSTALLINE MATERIALS; SENSITIVITY ANALYSIS; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

FULL WIDTH AT HALF MAXIMUM (FWHM); MULTILINE APPROACH; SENSITIVITY FACTOR METHOD;

SILICON;

EID: 0032475226 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00289-X Document Type: Article

Times cited : (11)

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