AES of semi-insulating polycrystalline silicon layers

Applied Surface Science

Volumn 99, Issue 1, 1996, Pages 9-14

  Liday, Jozef ^a   Tomek, Stanislav ^a   Breza, Juraj ^a  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRONS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SILICA; SYNTHESIS (CHEMICAL);

AUGER ELECTRONS; ELECTRON ENERGY LOSSES; SEMI INSULATING POLYCRYSTALLINE SILICON;

SURFACE STRUCTURE;

EID: 0030148547     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00452-1     Document Type: Article

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