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Volumn 3332, Issue , 1998, Pages 61-70

Nanometer-level metrology with a low-voltage CD-SEM

Author keywords

Accuracy; AFM; CD SEM; Low voltage; Metrology; Nano edge roughness; Nanometer; ULSI

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; LITHOGRAPHY; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; OPTICAL VARIABLES MEASUREMENT; POLYMERS; ULSI CIRCUITS;

EID: 0032402875     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308768     Document Type: Conference Paper
Times cited : (6)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.