Development of critical dimension measurement scanning electron microscope for ULSI (S-8000 series)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 105-113

  Ezumi, Makoto ^a   Otaka, Tadashi ^a   Mori, Hiroyoshi ^a   Todokoro, Hideo ^a   Ose, Yoichi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSION METROLOGY; SEMI-AUTOMATED OPERATIONS;

AUTOMATION; DISTANCE MEASUREMENT; GRAPHICAL USER INTERFACES; PATTERN RECOGNITION; SCANNING ELECTRON MICROSCOPY; ULSI CIRCUITS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029747370     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)