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Chinese Physics Letters

Volumn 15, Issue 2, 1998, Pages 120-122

Characterization of magnetron sputter CNx thin films

(2) Zheng, Wei Tao a,b Sundgren, J E b

a JILIN UNIVERSITY (China)

b LINKÖPING UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FILMS; ENERGY GAP; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE THIN FILMS; DIFFERENT SUBSTRATES; HIGH FREQUENCY HF; LOWER FREQUENCIES; REACTIVE MAGNETRON SPUTTERING; SPECTROSCOPIC ELLIPSOMETERS; SPECTROSCOPY DATA; SUBSTRATES TEMPERATURE; THIN-FILMS; X-RAY PHOTOELECTRONS;

THIN FILMS;

EID: 0032369780 PISSN: 0256307X EISSN: None Source Type: Journal
DOI: 10.1088/0256-307X/15/2/016 Document Type: Article

Times cited : (6)

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