MEMS applications in space exploration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 202-211

  Tang, William C ^a,b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b MEMS

Author keywords

Electro; Mechanical; MEMS; Micro; Overview; Reliability; Space applications; Systems; Technology

Indexed keywords

ELECTRO; MECHANICAL; MICRO; OVERVIEW; SYSTEMS;

APPLICATIONS; COST EFFECTIVENESS; MASS SPECTROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; RELIABILITY; SPACE FLIGHT; SPACE RESEARCH; SPACECRAFT; TECHNOLOGY;

SPACE APPLICATIONS;

EID: 0007764944     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284517     Document Type: Conference Paper

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