A study of rapid photothermal annealing of sputtered lead lanthanum zirconia titanate thin films

Journal of the Electrochemical Society

Volumn 145, Issue 12, 1998, Pages 4317-4322

  Chen, Y ^a   Singh, R ^a,b   Li, G ^b   Haertling, G H ^c  

^a Clemson University   (United States)

^b CLEMSON UNIVERSITY   (United States)

^c Equimeter Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC VARIABLES MEASUREMENT; FATIGUE OF MATERIALS; FERROELECTRICITY; LEAD COMPOUNDS; LEAKAGE CURRENTS; MICROCRACKS; RAPID THERMAL ANNEALING; THIN FILMS;

LEAD LANTHANUM ZIRCONIA TITANATE; RAPID PHOTOTHERMAL ANNEALING;

DIELECTRIC FILMS;

EID: 0032302380     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838957     Document Type: Article

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