Electrostatically deflectable polysilicon torsional mirrors

Sensors and Actuators: A. Physical

Volumn 44, Issue 1, 1994, Pages 83-89

  Fischer, M ^a   Graef, H ^a   von Munch W ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; ELECTROSTATICS; ETCHING; FINITE ELEMENT METHOD; MECHANICAL PROPERTIES; MICROMACHINING; MICROSTRUCTURE; MIRRORS; SOLVENTS;

ELECTROSTATICALLY DEFLECTABLE POLYSILICON TORSIONAL MIRRORS; SOFTWARE PACKAGE ANSYS;

SILICON SENSORS;

EID: 0028467254     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(94)00785-3     Document Type: Article

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