High-resolution laser-based deflection measurement system for characterizing aluminum electrostatic actuators

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 308-311

  Honer, Kenneth A ^a   Maluf, Nadim I ^a   Martinez, Edwardo ^a   Kovacs, Gregory T A ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANGLE MEASUREMENT; CLOSED LOOP CONTROL SYSTEMS; ELECTRIC NETWORK ANALYZERS; ELECTROSTATIC DEVICES; HELIUM NEON LASERS; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; PHOTODIODES; REAL TIME SYSTEMS; SIGNAL PROCESSING; SURFACES;

ALUMINUM ELECTROSTATIC ACTUATORS; ANGULAR DEFLECTION; LASER BASED DEFLECTION MEASUREMENT SYSTEM;

OPTICAL SYSTEMS;

EID: 0029546319     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)