Characteristics measurements of the 100 × 110 μm 2 fabricated micro mirror

LEOS Summer Topical Meeting

Volumn , Issue , 1996, Pages

  Chung, Seok Whan ^a   Shin, Jong Woo ^a   Kim, Yong Kweon ^a   Kim, Ho Seong ^a   Lee, Eun Ho ^a   Choi, Bum Kyoo ^a   Ahn, Se Jin ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM MIRROR PLATE; ELECTROSTATIC FORCE; MICRO MIRROR; NICKEL ELECTROPLATING;

ALUMINUM; ELECTRODES; ELECTROPLATING; ELECTROSTATICS; FABRICATION; NICKEL; OPTICAL VARIABLES MEASUREMENT; PHOTORESISTS; PLATE METAL; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

MIRRORS;

EID: 0029722486     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)