Improvement of electrical characteristics of BST thin films by Fe2O3 addition on RuO2 bottom electrodes

Journal of the Korean Physical Society

Volumn 33, Issue SUPPL. 2, 1998, Pages

  Seong, Jin Yong ^a   Paek, Su Hyon ^a   Lee, Kong Soo ^a   Ko, Bong Gyun ^a   Park, Chi Sun ^b   Mah, Jae Pyong ^c  

^a Hanyang University   (South Korea)

^b Hanseo University   (South Korea)

^c Honam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032274774     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. S. Yamamichi, K. Takemura, T. Sakuma, H. Watanabe et al., Int. Electron Device Meet. Tech. Dig. (1995), p. 119.
2. A. Yuuki, M. Yamamura, T. Makita, H. Abe et al., Int. Electron Device Meet. Tech. Dig. (1995), p. 119.
3. S. H. Paek, J. H. Won, J. E. Jang et al., J. Mat. Sci. 31, 4357 (1996).
4. Y. S. Hwang, S. H. Paek, J. H. Lee et al., J. Mat. Sci. (in Electronics 7, 1996), p. 309.
5. R. G. Vadimsky, R. P. Frankenthal and D. E. Thompson, J. Electrochem. Soc. 132, 2077 (1985).
6. S. H. Paek, J. H. Won, K. S. Lee et al., Jpn. J. Appl. Phys. 35, 5757 (1996).
7. K. Takemura, T. Sakuma, S. Matsubara, S. Yamamichi and Y. Mylasaka, Proc, 4th Int. Symp. Integrated Ferroelectric (Monterey, 1992), p. 481.
8. L. Kursin-elbauum and M. Witten, J. Electrochem. Soc. 135, 2610 (1988).
9. Wei Pan and Seshu B. Desu, J. Vac. Sci. Tech. B12, 2077 (1994).
10. Rauber Waser, J. Ameri. Ceram. Soc. 74, 1934 (1991).
11. S. H. Paek, E. S. Lee, J. Y. Seong et al., J. Mater. Sci., 33, 1239 (1998).
12. F. A. Kröger and H. J. Vink, Solid State Physics (Academic Press, New York, 1956), Vol. 3, p. 307.